The dielectric heating-assisted nanoimprint has developed for the rapid fabrication of the nanostructure-based biochips on polymer films. This method will benefit rapid temperature increases and cooling in nanoimprint process. Using the patterned nickel film as the mold, various nanostructures, such as nanowires, nanorods and nanogrids arrays, were successfully fabricated in few seconds The dielectric heating-sensitive polymer film was spin-coated on the substrate of the chip. The dielectric heating induces molecular vibration to generate heat energy on dielectric-sensitive polymer film within the electrode plate. The nickel mold and spin-coated film can be easily separated without release agents. The temperature rise of dielectric heating strongly depends on types of polymers. In our experiments, polyethylene terephthalate glycol-modified (PETG) and polyvinyl chloride (PVC) show better performance than other polymers. Using PVC solution for spin coating on glass substrate and peeling-off process after dielectric heating-assisted nanoimprint, a ultraflexible chip was made on PVC film with a thickness of about 20 μm. For surface plasmon resonance (SPR) sensing, the silver-coated nanowire arrays achieved a bandwidth of 6.01 nm. For bending angle measurement, the minimum detection angle was 2.4x10-3 degree under 0.02 nm wavelength resolution. For surface enhanced Raman scattering (SERS) sensing, the gold-coated nanorod arrays on a curved substrate can enhance SERS signals for two times as compared to planar substrate. The chips on the ultraflexible film may have great potentials for wearable devices.