This paper reports a novel method for rapid fabrication of micro-patterned conductive polymer device. In this method, a metal shadow mask with micro-pattern was fabricated by a combined photo-lithography and wet chemical etching process. The metal shadow mask was placed onto the plastic substrate to form the stack which was then fixed on the heating platform of spray coating system. The conductive polymer (PEDOT:PSS) solution was pumped through the nozzle and spray coating on the stack. The conductive polymer solution will flow into the micro-pattern of metal shadow mask. After proper curing process, the metal shadow mask was removed from plastic substrate. The micro-patterned conductive polymer device was fabricated. In this study, extreme ultraviolet radiation was used for surface modification of the plastic substrate. The processing conditions of spray coating with metal shadow mask were also investigated. The experimental results show that the novel method can potentially be used for effective fabrication of micro-patterned conductive polymer devices.