Recently, we reported that plasma-polymerized poly(ethylene glycol) (PP-PEG) film shows extremely low toxicity, low fouling, good durability, and chemical similarity to typical PEG polymers, enabling live cell patterning as well as various bioapplications using bioincompatible materials. In addition, the PP-PEG film can be overlaid on any materials via the capacitively coupled plasma chemical vapor deposition (CCP-CVD) method using nontoxic PEG200 as a precursor. Herein, we demonstrated that PP-PEG film could be safely applied to ocular surface disease. The ocular biocompatibility of the PP-PEG-coated surface was confirmed by application of PP-PEG film to ocular surface covering cornea and conjunctiva of C57BL6 mouse where no definite erosion and infection were observed, which was compared with bare polyethylene (PE) and polyethylene terephthalate (PET) surfaces. Furthermore, unlike bare PE films, less fibrosis and inflammation were observed when the PP-PEG-coated PE film is implanted into subconjunctival space. Our results suggest that our PP-PEG film, generated by the CCP-CVD method, is a biocompatible material that can be considered for ocular application.