Micro hot embossing process is widely used for manufacturing of polymeric components with complex surfaces. The physical properties of polymer plate in hot embossing process could be considered as viscoelastic or viscoplastic, depending on materials and temperatures. A large number of hot embossing experimental results have been published, the material modelling and processes simulation to improve the quality of micro replication by hot embossing process are still lacking. This paper consists to characterize the physical behaviours of amorphous polymers used in hot embossing process. The compression tests at the temperature range lightly above Tg have been carried on and an elastic-viscoplastic law has been proposed to describe the polymers’ behaviours in the tests. The experimental data fits well by the model with the identified parameters. It shows the further application for the numerical simulation of hot embossing process in the future.