Effect of processing history on the structure development of amorphous film was investigated through simultaneous measurement of stress and birefringence during multiple uni-axial stretching and relaxation. It was found that the relationship between stress and birefringence during stretching and relaxation exhibited hysteresis because of stress from elastic component which was shown at the beginning and end of stretching. The essential shape of this hysteresis did not change by splitting stretching process in 2 steps and insert relaxation process between those steps. On the other hand, initial modulus on the second stretching decreased from that of first stretching. The initial modulus on the second stretching did not change after long relaxation (30 min.) from first stretching, however, the modulus recovered with small contraction of strain. Those results shows some structure with long relaxation time was developed during first stretching and that structure was dissolved with contraction of strain and lose its stress.