Patterning large areas with micro-to-nanostructured geometries yields different surfaces functionality. Distributed nano patterns are used to control cell adhesion and positions to monitor the status of the cells growth and to study their activation of the body´s defence mechanism to foreign materials. Deterministic micro- to sub-micrometre structures, able to carry samples/reagents measured in the order of nano to picoliters are employed in Lab-on-a-chip micro-nanofluidic technologies. In this research a distributed nano-semi-sphere pattern over a large area of 30x80mm2 and a series of deterministic nanostructures such as nanochannels on a 100 mm diameter template were fabricated.The process to create semi-spheres master geometries to pattern the nickel mould used for polymer replication is based on anodization of aluminium. Fabricated semi-spheres have a diameter of 500 nm and sub-100 nm average height.The deterministic geometries were fabricated on a 100 mm diameter silicon wafer. The channels defined by e-beam were etched by selective reactive ion etching. The nickel stamper used for injection moulding was fabricated by subsequent nickel electroplating. Fabricated nanochannels have a minimum width of 500 nm and 60 nm average height.The capability of the injection moulding process to replicate both functional patterned surfaces and deterministic geometries into cyclic olefin copolymer (COC) Topas 6015 was investigated. Process optimization in terms of melt temperature, mould temperature, packing time and pressure, was performed.Replication quality assessment was performed using atomic force microscopy comparing critical dimensions in the nickel stampers with corresponding polymer nano-features dimensions. Replication of both vertical (depth) and lateral (pitch, width) dimensions was quantified for both distributed and deterministic nano structures.