Nowadays technical polymeric parts have to meet increasing functionalities, where the specific properties of their surfaces are essential components of the whole functional range. In most cases these surfaces get structured to create effects like e.g. self-cleaning properties (“Lotus effect”) or special cell growing behavior (e.g. tissue engineering, medical implants). However, mainly flat surfaces are structured so far, arisen from the usually used production methods. But current technical parts usually possess freeform surfaces, which demand structuring as well. A major problem in the mass production (e.g. injection moulding) of structured freeform surfaces is to demould the structures without ripping or deforming due to the occurring undercuts. Recently a novel concept was developed which overcomes this limitation and enables the structuring and easy demoulding of freeform surfaces. For test purposes a nickel substrate was manufactured in a conventional LIGA process. The substrate composed of lines orientated in two different directions, both with a cross-section of approximately 50 µm x 55 µm (w x h), was used as a premaster structure to cast a flexible master, made of poly(dimethylsiloxane) (PDMS). The PDMS master was mounted on a bending edge in an injection mould cavity, yielding a radius of 6 mm. Up to now, just proof of concept measurements were published. Within this paper the influence of process parameters on the replication grade of the structure lines depending on the structure orientation was evaluated, varying the holding pressure, melt and mould temperature using a design of experiments. The investigations additionally included determination of the influence of two PDMS types with different stiffness values. The replication grade was evaluated by characterizing the shape of the structure lines along the entire process chain, using confocal microscopy as well as an infinite focus system.