Wrinkled patterns are the result of mechanical instability induced by a mechanical mismatch between two layers that is easy to handle, reproducible, and very robust. A well-known way to gain such structures represents the oxidation of pre-strained polydimethylsiloxane (PDMS) slab by plasma treatment [Microchimica Acta, 2009, 165, 249 and Soft Matter, 2015, 11, 3332]. It creates in situ a glassy layer on top, while the consequent strain relaxation of the two-layer system results in a mechanical buckling instability that forms permanent wrinkles perpendicular to the strain direction. Depending on the applied strain, sinusoidal, bi-sinusoidal, or quadro-sinusoidal, wrinkle patterns can be accomplished with characteristic wavelength and amplitude. With different process parameters (e.g., process gas, pressure, time), a wide range of wavelengths from few 100nm to mm are achievable; also the stiffness and layer thickness of the top glass layer varies. Unique plasma processes allow gradient or hierarchical winkled structures with potential application in optics, biological adhesion processes, tribological areas. We move onward by fabricating blazed grating structures via angle-dependent thin metal film deposition on top of the PDMS wrinkles enabling them for enhanced light-matter interactions. Furthermore, the aforementioned wrinkling technique provides an alternative route towards large area fabrication of grating-waveguide resonant structures. These by virtue of flexibility, can find application in optomechanics as well as deformed based resonance sensors following guided mode resonance (GMR).